Scheduling dual-armed cluster tools with cleaning processes
Heejung Kim, Hyun-Jung Kim, Jun-Ho Lee and Tae-Eog Lee
| Year of publication: |
2013
|
|---|---|
| Authors: | Kim, Heejung ; Kim, Hyun-Jung ; Lee, Jun-ho ; Lee, Tae-eog |
| Published in: |
International journal of production research. - London : Taylor & Francis, ISSN 0020-7543, ZDB-ID 160477-6. - Vol. 51.2013, 12 (15.6.), p. 3671-3687
|
| Subject: | cleaning process | cluster tool | scheduling | semiconductor manufacture | Halbleiterindustrie | Semiconductor industry | Scheduling-Verfahren | Scheduling problem | Regionales Cluster | Regional cluster | Prozessmanagement | Business process management | Clusteranalyse | Cluster analysis | Algorithmus | Algorithm |
| Extent: | graph. Darst. |
|---|---|
| Type of publication: | Article |
| Type of publication (narrower categories): | Aufsatz in Zeitschrift ; Article in journal |
| Language: | English |
| Source: | ECONIS - Online Catalogue of the ZBW |
Persistent link: https://ebvufind01.dmz1.zbw.eu/10009775725