Semiconductor wafer fabrication production planning using multi-fidelity simulation optimisation
Fan Zhang, Jie Song, Yingzhuo Dai and Jie Xu
| Year of publication: |
2020
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|---|---|
| Authors: | Zhang, Fan ; Song, Jie ; Dai, Yingzhuo ; Xu, Jie |
| Published in: |
International journal of production research. - London [u.a.] : Taylor & Francis, ISSN 1366-588X, ZDB-ID 1485085-0. - Vol. 58.2020, 21, p. 6585-6600
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| Subject: | multi-fidelity model | optimisation | semiconductor production planing | simulation | wafer fabrication | Simulation | Produktionsplanung | Production planning | Halbleiter | Semiconductor | Halbleiterindustrie | Semiconductor industry | Mathematische Optimierung | Mathematical programming | Scheduling-Verfahren | Scheduling problem | Theorie | Theory |
| Type of publication: | Article |
|---|---|
| Type of publication (narrower categories): | Aufsatz in Zeitschrift ; Article in journal |
| Language: | English |
| Other identifiers: | 10.1080/00207543.2019.1683252 [DOI] |
| Source: | ECONIS - Online Catalogue of the ZBW |
Persistent link: https://www.econbiz.de/10012315481