Study on shop floor control system in semiconductor fabrication by self-organizing map-based intelligent multi-controller
| Year of publication: |
2012
|
|---|---|
| Authors: | Shiue, Yeou-Ren ; Guh, Ruey-Shiang ; Tseng, Tsung-Yuan |
| Published in: |
Computers & industrial engineering : CAIE ; an internat. journal. - Amsterdam [u.a.] : Elsevier, ISSN 0360-8352, ZDB-ID 1969936. - Vol. 62.2012, 4, p. 1119-1130
|