The importance of non-local shadowing for the topography evolution of a-C:H films grown by toluene based plasma enhanced chemical vapor deposition
| Year of publication: |
2009
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|---|---|
| Authors: | Hormann, C. ; Meier, S. ; Moseler, M. |
| Published in: |
The European Physical Journal B - Condensed Matter and Complex Systems. - Springer. - Vol. 69.2009, 2, p. 187-194
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| Publisher: |
Springer |
| Subject: | 81.15.Aa Theory and models of film growth | 81.15.Gh Chemical vapor deposition |
| Extent: | text/html |
|---|---|
| Type of publication: | Article |
| Source: |
Persistent link: https://www.econbiz.de/10009282876