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~isPartOf:"International journal of manufacturing technology and management"
~subject:"Industrieforschung"
~subject:"USA"
~subject:"Wissenstransfer"
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Micromachining of silicon with excimer laser in air and water medium
Das, Alok Kumar
;
Saha, Partha
- In:
International journal of manufacturing technology and …
21
(
2010
)
1/2
,
pp. 42-53
Persistent link: https://www.econbiz.de/10003988744
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