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~isPartOf:"International journal of production economics"
~subject:"Halbleiterindustrie"
~type_genre:"Konferenzbeitrag"
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Capacity planning
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Capacity planning for cluster tools in the semiconductor industry
Romauch, Martin
;
Hartl, Richard F.
- In:
International journal of production economics
194
(
2017
),
pp. 167-180
Persistent link: https://www.econbiz.de/10011785066
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