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~isPartOf:"International journal of production research"
~person:"Bettayeb, Belgacem"
~type_genre:"Mehrbändiges Werk"
~type_genre:"Multi-volume publication"
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Halbleiterindustrie
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Quality and exposure control in semiconductor manufacturing, Part II : Evaluation
Bettayeb, Belgacem
;
Basetto, Samuel
;
Vialletelle, Philippe
- In:
International journal of production research
50
(
2012
)
23
,
pp. 6852-6869
Persistent link: https://www.econbiz.de/10010219444
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Quality and exposure control in semiconductor manufacturing, Part I : Modelling
Bettayeb, Belgacem
;
Basetto, Samuel
;
Vialletelle, Philippe
- In:
International journal of production research
50
(
2012
)
23
,
pp. 6835-6851
Persistent link: https://www.econbiz.de/10009674375
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