RUSOP, M.; ABDULLAH, S.; PODDER, J.; SOGA, T.; JIMBO, T. - In: Surface Review and Letters (SRL) 13 (2006) 01, pp. 1-6
Nitrogenated diamond-like carbon films have been deposited on glass and p-type Si (100) substrates by radio frequency (r.f.) plasma-enhanced chemical vapor deposition (PECVD) with a frequency of 13.56 MHz at room temperature using CH4 as precursor of carbon source and H2 as a carrier gas. The...