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~person:"Chien, Chen-Fu"
~subject:"Big Data"
~subject:"data mining"
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Analysing semiconductor manufacturing big data for root cause detection of excursion for yield enhancement
Chien, Chen-Fu
;
Liu, Chiao-Wen
;
Chuang, Shih-Chung
- In:
International journal of production research
55
(
2017
)
17/18
,
pp. 5095-5107
Persistent link: https://www.econbiz.de/10011723925
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