JIAO, L.; NG, E. Y. K.; ZHENG, H.; WEE, L. M. - In: Surface Review and Letters (SRL) 18 (2011) 01, pp. 39-45
This study investigated the relationship and parameters interactions between five independent variables in laser percussion drilling of micro-hole. Experiments were conducted on single crystal silicon wafer with material thickness of 725 μm using femtosecond (fs) laser with wavelength of 775 nm...