Indium oxide (InOx) thin films have attractive carrier transport properties for oxide semiconductors because of the large isotropic 5s orbital overlap in the In3+ ions. In this study, InOx films were deposited by plasma-enhanced atomic layer deposition (PEALD). We evaluated the effects of the...

Indium oxide (InO x ) thin films have attractive carrier transport properties for oxide semiconductors because of the large isotropic 5s orbital overlap in the In 3+ ions. In this study, InO x films were deposited by plasma-enhanced atomic layer deposition (PEALD). We evaluated the effects of...