In this paper we propose mathematical model for calculating XPS intensity distribution from the textured sample surface. The surface roughness is approximated using different 3D geometrical shapes (triangular prisms, cone-shaped rings). Analytical expressions for XPS intensity calculation are...

In the present work a numerical modelling of the processes of exposure and development of the resist during electron beam lithography (EBL) on structures incorporating YBa2Cu3O7 high temperature superconductor (HTS) thin films is performed. Monte Carlo method is used to simulate the penetration...