HUY, NGUYEN THANH; HUNG, VU NGOC - In: Surface Review and Letters (SRL) 18 (2011) 01, pp. 47-51
A thin adhesion layer is required to glue Pt bottom electrodes of ferroelectric Pb(Zr,Ti)O3 thin films to a SiO2/Si wafer. Here we report the effect of adhesion layers, Ti and TiO2, on the crystalline structure and surface properties of Pt electrode. The results show that the hillock formation...