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Search: subject:"Cluster tool"
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cleaning
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concurrent processing
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cyclic scheduling
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event graph
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Kim, Hyun-Jung
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Lee, Tae-Eog
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International journal of production research
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ECONIS (ZBW)
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Wafer delay analysis and control of dual-armed cluster tools with chamber cleaning operations
Yu, Tae-Sun
;
Lee, Tae-Eog
- In:
International journal of production research
58
(
2020
)
2
,
pp. 434-447
Persistent link: https://www.econbiz.de/10012193971
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2
Capacity planning for cluster tools in the semiconductor industry
Romauch, Martin
;
Hartl, Richard F.
- In:
International journal of production economics
194
(
2017
),
pp. 167-180
Persistent link: https://www.econbiz.de/10011785066
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3
Optimal scheduling for sequentially connected cluster tools with dual-armed robots and a single input and output module
Kim, Dae-Kyu
;
Kim, Hyun-Jung
;
Lee, Tae-Eog
- In:
International journal of production research
55
(
2017
)
11/12
,
pp. 3092-3109
Persistent link: https://www.econbiz.de/10011655092
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4
Scheduling cluster tools for concurrent processing of two wafer types with PM sharing
Lee, Jun-Ho
;
Kim, Hyun-Jung
;
Lee, Tae-Eog
- In:
International journal of production research
53
(
2015
)
19
,
pp. 6007-6022
Persistent link: https://www.econbiz.de/10011421686
Saved in:
5
Scheduling dual-armed cluster tools with cleaning processes
Kim, Heejung
;
Kim, Hyun-Jung
;
Lee, Jun-ho
;
Lee, Tae-eog
- In:
International journal of production research
51
(
2013
)
12
,
pp. 3671-3687
Persistent link: https://www.econbiz.de/10009775725
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