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Search: subject:"Feed Forward Control"
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Control Strategy
1
Critical dimension
1
Feed Forward Control
1
Feed-forward control
1
Manufacturing intelligence
1
Pitch Control
1
Power Variation
1
Run-to-run (R2R)
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Tool affinity
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Tool dispatching
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Arinaga, Shinji
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Computers & operations research : and their applications to problems of world concern ; an international journal
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Renewable Energy
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ECONIS (ZBW)
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A novel approach to hedge and compensate the critical dimension variation of the developed-and-etched circuit patterns for yield enhancement in semiconductor manufacturing
Chien, Chen-Fu
;
Chen, Ying-Jen
;
Hsu, Chia-Yu
- In:
Computers & operations research : and their …
53
(
2015
),
pp. 309-318
Persistent link: https://www.econbiz.de/10010493471
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2
Power variation control of a wind generator by using
feed
forward
control
Kodama, Naruhito
;
Matsuzaka, Tomoyuki
;
Tuchiya, Keiichi
; …
- In:
Renewable Energy
16
(
1999
)
1
,
pp. 847-850
variations by introducing
feed
forward
control
combining with the conventional feed back control. …
Persistent link: https://www.econbiz.de/10010806752
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