Heitzinger, Clemens; Hössinger, Andreas; Selberherr, … - In: Mathematics and Computers in Simulation (MATCOM) 66 (2004) 2, pp. 219-230
We present an algorithm for smoothing results of three-dimensional Monte Carlo ion implantation simulations and translating them from the grid used for the Monte Carlo simulation to an arbitrary unstructured three-dimensional grid. This algorithm is important for joining various simulations of...