This OECD Emission Scenario Document (ESD) provides information on the sources, use patterns, and potential release pathways of chemicals used as chemical vapour deposition (CVD) precursors in the semiconductor industry. The document presents standard approaches for estimating environmental...

This paper compares several different production control policies in terms of their robustness to random disturbances such as machine failures, demand fluctuations, and system parameter changes. Simulation models based on VLSI wafer fabrication facilities are utilized to test the performance of...