We present the fabrication of large-scale two-dimensional periodic silicon nanoarrays using nanosphere lithography. The techniques start from a monolayer of self-assembled polystyrene (PS) spheres of 220 nm in diameter on water surface, which works as a mask to fabricate large-scale periodic...

Highly ordered crystalline and amorphous Si nanoarrays have been formed by using self-assembled monolayer of polystyrene nanospheres as a template followed by dry ion etching treatments. The template was removed by annealing at 8°C and pattern transfer process was revealed by atomic force...