Search Results - subject:"plasma simulation"

Exploiting Laboratory and Heliophysics Plasma Synergies

Dahlburg, Jill; Amatucci, William; Brown, Michael; … - In: Energies 3 (2010) 5, pp. 1014-1048

Recent advances in space-based heliospheric observations, laboratory experimentation, and plasma simulation codes are … observations and simulations), and a dynamo facility under construction there; the Space Plasma Simulation Chamber at the Naval …

Persistent link: https://www.econbiz.de/10011030794

REACTION SIMULATION AND EXPERIMENT OF A Cl2/Ar INDUCTIVELY COUPLED PLASMA FOR ETCHING OF SILICON

GE, JIE; LIU, XUAN; YANG, YI; SONG, YIXU; REN, TIANLING - In: Surface Review and Letters (SRL) 21 (2014) 03, pp. 1450038-1

As the key feature size keeps shrinking down, inductively coupled plasma (ICP) has been widely used for etching. In this study, a commercial ICP etcher filled with Cl2/Ar mixture was simulated. The simulation was based on a commercial software CFD-ACE+, which is a multi-module solver. For the...

Persistent link: https://www.econbiz.de/10010779415