Purpose – For semiconductor and gene‐chip microarray fabrication, robots are widely used to handle workpieces. It is critical that robots can calibrate themselves regularly and estimate workpiece pose automatically. This paper proposes an industrial method for automatic robot calibration and...

Relaxation-time approximations of the collisional operator of the Boltzmann transport equation are used for simulating carrier transport in silicon semiconductors. Solutions of these kinetic models are obtained through the use of exact-integral representations in the stationary and homogeneous...

We describe a percolation based model for the dielectric breakdown of metal-oxide-semiconductor capacitors where the dielectric constant varies randomly throughout the oxide layer. We consider the SiO2 oxide within a rectangular lattice framework, and the breakdown is simulated as a cluster...

During these years several hydrodynamic-like models for simulating carrier transport in semiconductors have been developed. In this paper we check the consistency of these models with the Onsager Reciprocity Principle, which is one of the fundamental principles of Linear Irreversible...

A brief review of the semi-classical Monte Carlo method for semiconductor device simulation is given, covering the standard Monte Carlo algorithms, variance reduction techniques, the self-consistent solution, and the physical semiconductor model including band structure and scattering...