Toggle navigation
Logout
Change account settings
EN
DE
ES
FR
A-Z
Beta
About EconBiz
News
Thesaurus (STW)
Academic Skills
Help
EN
DE
ES
FR
My account
Logout
Change account settings
Login
Publications
Events
Your search terms
Search
Search options
All Fields
Title
Exact title
Subject
Author
Institution
ISBN/ISSN
Published in...
Publisher
Open Access only
Advanced
Search history
My EconBiz
Favorites
Loans
Reservations
Fines
You are here:
Home
Search: subject:"tool parameter traces."
Narrow search
Narrow search
Year of publication
From:
To:
Subject
All
Estimation theory
1
Halbleiter
1
Halbleiterindustrie
1
Kalman filtering
1
Multivariate Analyse
1
Multivariate analysis
1
Schätztheorie
1
Semiconductor
1
Semiconductor industry
1
Time series analysis
1
Zeitreihenanalyse
1
dynamic time warping
1
multivariate analysis
1
recursive T 2 update
1
semiconductor manufacturing tool
1
tool fault detection
1
tool parameter traces.
1
more ...
less ...
Type of publication
All
Article
1
Type of publication (narrower categories)
All
Article in journal
1
Aufsatz in Zeitschrift
1
Language
All
English
1
Author
All
Kim, Chang Ouk
1
Ko, Jong Myoung
1
Published in...
All
International journal of production research
1
Source
All
ECONIS (ZBW)
1
Showing
1
-
1
of
1
Sort
relevance
articles prioritized
date (newest first)
date (oldest first)
1
A multivariate parameter trace analysis for online fault detection in a semiconductor etch tool
Ko, Jong Myoung
;
Kim, Chang Ouk
- In:
International journal of production research
50
(
2012
)
23
,
pp. 6639-6654
Persistent link: https://www.econbiz.de/10009673530
Saved in:
Results per page
10
25
50
100
250
A service of the
zbw
×
Loading...
