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Ti films 1 atomic force microscopy 1 magnetron sputtering 1 oxidation 1 topographical evolution 1
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JIN, YONGZHONG 1 LI, XINYUE 1 LIU, DONGLIANG 1 YANG, RUISONG 1 ZENG, XIANGUANG 1
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Surface Review and Letters (SRL) 1
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TOPOGRAPHICAL EVOLUTION OF MAGNETRON SPUTTERING Ti THIN FILMS DURING OXIDATION OBSERVED BY AFM
LI, XINYUE; JIN, YONGZHONG; LIU, DONGLIANG; ZENG, XIANGUANG - In: Surface Review and Letters (SRL) 18 (2011) 01, pp. 61-69
Titanium films of 120 nm thickness were magnetron sputtered on glass substrates at room temperature, and subsequently they were annealed under flowing oxygen atmosphere at different temperatures and time. Atomic force microscopy (AFM) was used to study topographic characteristics of the films,...
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