This report constitutes an emission scenario document (ESD) for chemicals used in the electronics industry. It provides information on the sources and release pathways of chemicals during various processing techniques relevant to this varied industry sector, to help estimate releases of...

This OECD Emission Scenario Document (ESD) provides information on the sources, use patterns, and potential release pathways of chemicals used as chemical vapour deposition (CVD) precursors in the semiconductor industry. The document presents standard approaches for estimating environmental...