LIAO, YUANBAO; WU, JIAJIA; XU, LING; YANG, FEI; LIU, WENQING - In: Surface Review and Letters (SRL) 17 (2010) 04, pp. 405-410
Chalcogenide phase change material Ge1Sb2Te4 (GST) nanoparticle arrays with long-range-order were fabricated by using a monolayer of self-assembled polystyrene (PS) spheres as mask. The morphology of nanoparticle arrays can be controlled via changing RIE processing conditions. Images of atomic...
