Uniformly hemispherical separated CuInSe2 (CIS) quantum dots (QDs) were fabricated by low-frequency inductivity coupled plasma (LF-ICP) assisted radio-frequency (RF) magnetron sputtering technique from a ternary compound target on Si (100) and glass substrate with ZnO film serving as buffer...

Quaternary SiCAlN nanoparticle films were produced by reactive rf magnetron co-sputtering technique with a chemically pure SiC and an Al target under low temperature. The crystalline structure, surface morphology, and element content of the films were studied in terms of sputtering parameters....

Cadmium sulfide (CdS) nanocrystals are successfully fabricated on glass and silicon substrates at room temperature with low-frequency (460 kHz) inductively coupled plasma assisted magnetron sputtering technique. Both size and shape can be controlled by changing deposition parameters and...

Polycrystalline silicon carbide (P-SiC) films containing SiC nanoparticles and Er were prepared by r.f. reactive magnetron co-sputtering technique with SiC and Er targets on low-temperature silicon (111) and silicon dioxide substrates with the mixed gas of pure argon, methane, and hydrogen....