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Bulk micromachining for SOI based microsystems using double side XeF2 etching
Bhaskar, Avinash K.
;
Packirisamy, Muthukumaran
;
Bhat, …
- In:
International journal of manufacturing technology and …
13
(
2008
)
2/3/4
,
pp. 297-307
Persistent link: https://www.econbiz.de/10003641433
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