Many process capability indices have been proposed to measure process performance. In this paper, we first review C p , C pk , C pm and C pmk , and their generalizations, C Np , C Npk , C Npm and C Npmk , and then propose a new index S pmk for any underlying distribution, which takes into...

Recent years have seen mounting interest in measuring process performance in the manufacturing industry. Analysis of process capability indices allows a production department to trace and improve a poor process to enhance quality and satisfy customers. Process capability analysis can also serve...

During the complicated production process in integrated circuit (IC) fabrication, various types of defects on a wafer surface are unavoidable. As the wafer size increases, the clustering phenomenon of the defects becomes increasingly apparent. To upgrade IC products’ yield and reliability,...