WANG, XINCHANG; ZHANG, JIANGUO; ZHANG, TAO; SHEN, BIN; … - In: Surface Review and Letters (SRL) 20 (2013) 03, pp. 1350031-1
Finite volume method (FVM) is adopted in the present investigation to simulate the temperature and reactant gas velocity distributions in hot filament chemical vapor deposition (HFCVD) diamond film growth inside holes, using a detailed 3D computational model well in accordance with the actual...