Defects on semiconductor wafers tend to cluster and the spatial defect patterns contain useful information about potential problems in the manufacturing process. This study proposes to use model-based clustering algorithms via Bayesian inferences for spatial defect pattern recognition on...

The (n,f,k) (<n,f,k>) system consists of n components ordered in a line or a circle and the system fails if and only if there exist at least f failed components or (and) at least k consecutive failed components. This type of models involves two common failure criteria of a system. In this paper, the...</n,f,k>