The concept of mass production essentially involves the assembly of identical or interchangeable parts of components into the final product at different stages and workstations. The relative advantages and disadvantages of mass or flow production are a matter of concern for any mass production...

Interval robotic cells with several processing stages (chambers) have been increasingly used for diverse wafer fabrication processes in semi-conductor manufacturing. Processes such as low-pressure chemical vapor deposition, etching, cleaning and chemical-mechanical planarization, require strict...