ZHANG, YONG-JU; YU, SEN-JIANG; ZHOU, HONG; CHEN, MIAO-GEN; … - In: Surface Review and Letters (SRL) 19 (2012) 03, pp. 1250022-1
Tantalum (Ta) films deposited on glass substrates have been prepared by a direct current magnetron sputtering method …, and buckling patterns induced by residual compressive stress are investigated in detail. When the film thickness increases …, the buckling morphologies evolve from straight-sided buckle network to wavy or wormlike wrinkles gradually, and finally …