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The Role of DOE for Robust Eng...
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The use of a simulation, a hybrid Taguchi, and dual response surface methods in the automated material handling system tool-to-tool strategy for a 300-mm fab
Yang, Taho
;
Shen, Yu-An
;
Cho, Chiwoon
;
Lin, Yu-Ru
- In:
European journal of industrial engineering : EJIE
6
(
2012
)
3
,
pp. 281-300
Persistent link: https://www.econbiz.de/10009561414
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