RUSOP, M.; ABDULLAH, S.; PODDER, J.; SOGA, T.; JIMBO, T. - In: Surface Review and Letters (SRL) 13 (2006) 01, pp. 7-12
Boron-doped hydrogenated amorphous carbon (a-C:B:H) thin films have been deposited by radio frequency plasma-enhanced chemical vapor deposition (r.f. PECVD) with a frequency of 13.56 MHz at room temperature using pure methane as a precursor of carbon source mixed with hydrogen (H2) as a carrier...
