MAHESWARAN, R.; RAMASWAMY, SHIVARAMAN; MAHAPATRA, OJAS; … - In: Surface Review and Letters (SRL) 16 (2009) 06, pp. 881-886
Plasma-enhanced chemical vapor deposition has been used to synthesize diamond-like carbon (DLC) thin films. High purity argon and methane gases were used as precursors for the fabrication of the DLC films. The influence of plasma pretreatment on the growth of the DLC films has been studied by...