A bounded-error approach to accuracy analysis in ellipsometry

A nonlinear Bounded-Error Estimation method is applied to the case of ellipsometric measurement of film properties. It is shown that this method can be used with advantage for estimating the magnitude of the measurement errors including systematic errors.

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Year of publication:	1990
Authors:	Smit, M.K. ; Verhoof, J.W.
Published in:	Mathematics and Computers in Simulation (MATCOM). - Elsevier, ISSN 0378-4754. - Vol. 32.1990, 5, p. 545-551
Publisher:	Elsevier

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Type of publication:	Article
Source:	RePEc - Research Papers in Economics

Persistent link: https://www.econbiz.de/10010870352