A generalised uncertain decision tree for defect classification of multiple wafer maps
Byunghoon Kim, Young-Seon Jeong, Seung Hoon Tong and Myong K. Jeong
| Year of publication: |
2020
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|---|---|
| Authors: | Kim, Byunghoon ; Jeong, Young-Seon ; Tong, Seung Hoon ; Jeong, Myong K. |
| Published in: |
International journal of production research. - London [u.a.] : Taylor & Francis, ISSN 1366-588X, ZDB-ID 1485085-0. - Vol. 58.2020, 9, p. 2805-2821
|
| Subject: | DRAM | semiconductor wafer | uncertain data classification | uncertain feature | Theorie | Theory | Klassifikation | Classification | Entscheidungsbaum | Decision tree | Risiko | Risk | Halbleiterindustrie | Semiconductor industry | Entscheidung unter Unsicherheit | Decision under uncertainty | Halbleiter | Semiconductor |
| Type of publication: | Article |
|---|---|
| Type of publication (narrower categories): | Aufsatz in Zeitschrift ; Article in journal |
| Language: | English |
| Other identifiers: | 10.1080/00207543.2019.1637035 [DOI] |
| Source: | ECONIS - Online Catalogue of the ZBW |
Persistent link: https://www.econbiz.de/10012265272