A multivariate parameter trace analysis for online fault detection in a semiconductor etch tool
| Year of publication: |
2012
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|---|---|
| Authors: | Ko, Jong Myoung ; Kim, Chang Ouk |
| Published in: |
International journal of production research : American Institute of Industrial Engineers ; Society of Manufacturing Engineers. - London : Taylor & Francis, ISSN 0020-7543, ZDB-ID 1604776. - Vol. 50.2012, 23 (1.12.), p. 6639-6655
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