A real-time scheduling method for the cluster tool with wafer transfer delay
Si-Yeong Lim, You-Jin Park, Hyun Lee and Sun Hur
| Year of publication: |
2014
|
|---|---|
| Authors: | Lim, Si-yeong ; Park, You-jin ; Lee, Hyun ; Hur, Sun |
| Published in: |
International journal of production research. - London : Taylor & Francis, ISSN 0020-7543, ZDB-ID 160477-6. - Vol. 52.2014, 4 (15.2.), p. 934-946
|
| Subject: | semiconductor | 450mm wafer manufacturing system | real-time scheduling | job shop | wafer delay | timetabling | Scheduling-Verfahren | Scheduling problem | Theorie | Theory | Produktionssteuerung | Production control | Halbleiterindustrie | Semiconductor industry | Terminplanung | Time scheduling | Produktionssystem | Manufacturing system |
| Extent: | Ill., graph. Darst. |
|---|---|
| Type of publication: | Article |
| Type of publication (narrower categories): | Aufsatz in Zeitschrift ; Article in journal |
| Language: | English |
| Source: | ECONIS - Online Catalogue of the ZBW |
Persistent link: https://www.econbiz.de/10010256323