A study of improving overlay accuracy by applying a new outlier handling method in FPD manufacturing
Seungjoo Lee and Seong Gu Kang
| Year of publication: |
2015
|
|---|---|
| Authors: | I, Seung ju ; Kang, Seong Gu |
| Published in: |
International journal of production research. - London : Taylor & Francis, ISSN 0020-7543, ZDB-ID 160477-6. - Vol. 53.2015, 14 (15.7.), p. 4249-4265
|
| Subject: | overlay error correction | outliers | photo lithography process | flat panel display (FDP) | robust regression |
| Extent: | graph. Darst. |
|---|---|
| Type of publication: | Article |
| Type of publication (narrower categories): | Aufsatz in Zeitschrift ; Article in journal |
| Language: | English |
| Source: | ECONIS - Online Catalogue of the ZBW |
Persistent link: https://www.econbiz.de/10011302780