A system for online detection and classification of wafer bin map defect patterns for manufacturing intelligence
Chen-Fu Chien, Shao-Chung Hsu and Ying-Jen Chen
| Year of publication: |
2013
|
|---|---|
| Authors: | Chien, Chen-fu ; Hsu, Shao-chung ; Chen, Ying-jen |
| Published in: |
International journal of production research. - London : Taylor & Francis, ISSN 0020-7543, ZDB-ID 160477-6. - Vol. 51.2013, 8 (15.4.), p. 2324-2338
|
| Subject: | adaptive resonance theory | data mining | manufacturing intelligence | semiconductor manufacturing | statistical process control | wafer bin map | yield enhancement | Taiwan | Data Mining | Data mining | Industrie | Manufacturing industries | Halbleiterindustrie | Semiconductor industry | Statistische Qualitätskontrolle | Statistical quality control | Algorithmus | Algorithm |
| Extent: | graph. Darst. |
|---|---|
| Type of publication: | Article |
| Type of publication (narrower categories): | Aufsatz in Zeitschrift ; Article in journal |
| Language: | English |
| Source: | ECONIS - Online Catalogue of the ZBW |
Persistent link: https://ebvufind01.dmz1.zbw.eu/10009731376