Achieving Uniformity in a Semiconductor Fabrication Process Using Spatial Modeling
| Year of publication: |
1998
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|---|---|
| Authors: | Hughes-Oliver, Jacqueline M. ; Lu, Jye-Chyi ; Davis, Joseph C. ; Gyurcsik, Ronald S. |
| Published in: |
Journal of the American Statistical Association : JASA. - Abingdon : Taylor & Francis Group, ISSN 0162-1459, ZDB-ID 2076020. - Vol. 93.1998, 441, p. 36-45
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