Allocating metrology capacity to multiple heterogeneous machines
Stéphane Dauzère-Pérès, Michael Hassoun and Alejandro Sendon
| Year of publication: |
1-15 October 2016
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|---|---|
| Authors: | Dauzère-Péres, Stéphane ; Hassoun, Michael ; Sendon, Alejandro |
| Published in: |
International journal of production research. - London : Taylor & Francis, ISSN 0020-7543, ZDB-ID 160477-6. - Vol. 54.2016, 19/20 (1/15.10.), p. 6082-6091
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| Subject: | semiconductor manufacturing | metrology | integer linear programming | heuristics | multiple-choice knapsack problem | Theorie | Theory | Heuristik | Heuristics | Ganzzahlige Optimierung | Integer programming | Mathematische Optimierung | Mathematical programming | Halbleiterindustrie | Semiconductor industry | Kapazitätsplanung | Capacity planning | Scheduling-Verfahren | Scheduling problem |