Applying the Automatic Virtual Metrology system to obtain tube-to-tube control in a PECVD tool
| Year of publication: |
2013
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| Authors: | Cheng, Fan-Tien ; Chiu, Yu-Chen |
| Published in: |
IIE transactions / Institute of Industrial Engineers, Norcross, Ga : industrial engineering and development. - Philadelphia, Pa : Taylor & Francis, ISSN 0569-5554, ZDB-ID 2460191. - Vol. 45.2013, 6 (1.6.), p. 670-681
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