Conversion of non-calendar to calendar-time based preventive maintenance schedules for semiconductor manufacturing systems
| Year of publication: |
2007
|
|---|---|
| Authors: | Ramirez-Hernandez, J. A. ; Fernandez, E. ; O'Connor, M. ; Patel, N. |
| Published in: |
Journal of quality in maintenance engineering : JQME. - Bradford : Emerald, ISSN 1355-2511, ZDB-ID 12876392. - Vol. 13.2007, 3, p. 259-275
|
| Type of publication: | Article |
|---|---|
| Notes: | (c) British Library |
| Source: |
Persistent link: https://www.econbiz.de/10007766964