Data transformation in SPC for semiconductor machinery control: A case of monitoring particles
| Year of publication: |
2005
|
|---|---|
| Authors: | Chen, M.-C. ; Su, C.-T. ; Hsu, C.-C. ; Liu, Y.-W. |
| Published in: |
International journal of production research : American Institute of Industrial Engineers ; Society of Manufacturing Engineers. - London : Taylor & Francis, ISSN 0020-7543, ZDB-ID 1604776. - Vol. 43.2005, 13, p. 2759-2774
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