DEPOSITION AND CHARACTERIZATION OF TiN-COATED STEELS AT VARIOUS N2 GAS FLOW RATES WITH CONSTANT ETCHING BY USING CAPVD TECHNIQUE
Year of publication: |
2007
|
---|---|
Authors: | ALI, MUBARAK ; HAMZAH, ESAH BINTI ; TOFF, MOHD RADZI HJ. MOHD |
Published in: |
Surface Review and Letters (SRL). - World Scientific Publishing Co. Pte. Ltd., ISSN 1793-6667. - Vol. 14.2007, 01, p. 93-100
|
Publisher: |
World Scientific Publishing Co. Pte. Ltd. |
Subject: | PVD | TiN | macrodroplets | surface roughness | microhardness | adhesion |
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