EFFECT OF SUBSTRATE TEMPERATURE ON MICROSTRUCTURE AND WEAR BEHAVIOR OF MAGNETRON SPUTTERED CrCuN FILMS

CrCuN films were deposited under different substrate temperatures by direct current (DC) magnetron sputtering. The structure and wear resistance of the films were then studied. The substrate temperature has almost no effect on the film composition, phase constitution and preferred orientation. The CrCuN films have 3 at.% Cu and consist of CrN phases with CrN(200) preferential growth independent of the substrate temperature. But a strong effect of the substrate temperature on the wear behavior is noticed. The film prepared under the substrate temperature of 100°C has the best wear performance. Its friction coefficient and wear rate are 0.1 and 6.6 × 10-6 mm3/Nm, respectively.