Estimating and incorporating the effects of a future QE project into a semiconductor yield learning model with a fuzzy set approach
Year of publication: |
2009
|
---|---|
Authors: | Chen, Toly |
Published in: |
European Journal of Industrial Engineering. - Inderscience Enterprises Ltd, ISSN 1751-5254. - Vol. 3.2009, 2, p. 207-226
|
Publisher: |
Inderscience Enterprises Ltd |
Subject: | fuzzy Delphi method | correction function | semiconductor manufacturing | quality engineering | yield learning | fuzzy sets | fuzzy logic | yield prediction | modelling |
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