Evaluating and controlling silicon wafer slicing quality using fuzzy analytical hierarchy and sensitivity analysis
Year of publication: |
2008
|
---|---|
Authors: | Chang, Che-Wei ; Wu, Cheng-Ru ; Lin, Chin-Tsai ; Chen, Huang-Chu |
Published in: |
The international journal of advanced manufacturing technology. - London : Springer, ISSN 0268-3768, ZDB-ID 52651-4. - Vol. 36.2008, 3/4, p. 322-333
|
Subject: | Fuzzy-Set-Theorie | Fuzzy sets | AHP-Verfahren | AHP approach | Sensitivitätsanalyse | Sensitivity analysis |
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