Fuzzy-based risk priority number in FMEA for semiconductor wafer processes
Tsu-Ming Yeh and Long-Yi Chen
| Year of publication: |
2014
|
|---|---|
| Authors: | Yeh, Tsu-ming ; Chen, Long-yi |
| Published in: |
International journal of production research. - London : Taylor & Francis, ISSN 0020-7543, ZDB-ID 160477-6. - Vol. 52.2014, 2 (15.1.), p. 539-549
|
| Subject: | failure mode and effect analysis (FMEA) | risk priority number (RPN) | fuzzy theory | semiconductor wafer manufacturing processes | Qualitätsmanagement | Quality management | Fuzzy-Set-Theorie | Fuzzy sets | Halbleiter | Semiconductor | Halbleiterindustrie | Semiconductor industry | Risiko | Risk | Prozessmanagement | Business process management | Risikomanagement | Risk management | Multikriterielle Entscheidungsanalyse | Multi-criteria analysis |
| Extent: | graph. Darst. |
|---|---|
| Type of publication: | Article |
| Type of publication (narrower categories): | Aufsatz in Zeitschrift ; Article in journal |
| Language: | English |
| Source: | ECONIS - Online Catalogue of the ZBW |
Persistent link: https://www.econbiz.de/10010249785